Search
RIE Engineer

RIE Engineer

locationCambridge, MA, USA
remoteHybrid
PublishedPublished: 8/30/2025
Company Description

By working at Harvard University, you join a vibrant community that advances Harvard's world-changing mission in meaningful ways, inspires innovation and collaboration, and builds skills and expertise. We are dedicated to creating a diverse and welcoming environment where everyone can thrive.

Why join the Harvard Faculty of Arts and Sciences?

The Faculty of Arts and Sciences (FAS) is the historic heart of Harvard University. It is the home of Harvard’s undergraduate program (Harvard College, founded in 1636) as well as all of Harvard’s Ph.D. programs (the Harvard Kenneth C. Griffin Graduate School of Arts and Sciences, founded in 1872), Harvard Athletics and the Division of Continuing Education. The 40 academic departments and 30+ centers of the FAS support a community unparalleled in its academic excellence across the broadest range of liberal arts and sciences disciplines. Together, the FAS seeks to foster an environment of ambition, curiosity and shared commitment to knowledge and truth that elicits excellence from all members of our community and prepares the next generation of leaders through a transformative educational experience.


Job Description

Job Summary:

Independently provide professional engineering expertise in a core facility in process design, training, quality assurance, and developmental activities.


Job-Specific Responsibilities:

The CNS-nanofabrication facility (cleanroom) is the busiest lab in the field, and is supporting more than 900 users (in FY2019) from more than 250 internal and external research groups. The dry etching (RIE) and film depositions (CVD and PVD) are the most critical processes in the nanofabrication and includes more than 40 complex equipment plus ancillary facilities and supports more that 70-80% of users (600-800). The RIE Equipment Engineer is responsible for the equipment from RIE to other CVD areas and is the primary owner of more than 20 of complex and heavily used tools, covering ICP-RIEs, PECVDs, sputtering deposition systems, and scrubbers. This position assists with the evaluation and installation of new and advanced nanofabrication tools and related processes.

Evaluate, install and support state-of-the-art process equipment. Investigate and innovate new hardware configurations and functions of tools to commit the new process requirement for advanced research. Assist researchers, faculty, and students regarding experimental design and use of equipment, instruments, systems and facilities.

Manages all cleanroom gases (more than 15 of toxic and non-toxic gases) activities and related facilities/tools for nanofabrication, including gas inventory of ordering and maintaining, daily gas suppling and safety monitoring, gas cylinders and cabinets maintenance, toxic and nontoxic gas cylinder replacing safely into gas delivery systems, and new process gas investigation for new research applications.

Manages and maintains spare parts inventory and critical components for more than 50 nanofabrication process tools (dry etching, CVDs, PVDs), including pumps, chambers, RF generators, controllers, chillers, scrubbers, compressors, and other hardware. Facilitates offsite repair of components used on equipment.

Collaborates with staff and assists with the development of processes.

Trains users on best safety practices and assist in monitoring laboratory safety compliance. ERT team member, especially the key responder for toxic gas related safety monitoring and handling.

Working Conditions:

  • May be required to work in a cleanroom, chemical, or measurement laboratory environments
  • May be exposed to toxic, radioactive, or carcinogenic materials including compressed gases, acids, solvents, vacuum pump oils, and other chemicals
  • May be required to work nights and weekends
  • Mostly in the cleanroom, outside labs, and facility rooms. Office for interfacing users and vendor meetings, as well as paperwork.

Physical Requirements:

  • Lifting (up to approximately 50 pounds), bending, and other physical exertion
  • Standing and/or sitting for extended periods
  • Pushing, pulling, lifting, repetitive motion

Qualifications

Basic Qualifications:

  • Bachelor’s degree in an engineering or related field and a minimum of three years’ relevant work experience; or
  • A minimum of seven years of relevant work experience or equivalent combination of education and experience

Additional Qualifications and Skills:

  • Knowledge of Microsoft Office Suite, intermediate Excel skills.
  • Excellent written and oral communication skills are required.
  • Must possess excellent problem-solving skills.
  • Cleanroom experience and user-facility experience are highly desirable.
  • Cleanroom fabrication experience, especially in plasma etching (ICP, ECR, DRIE), film deposition, and high vacuum system highly desirable.
  • The candidate should be self-motivated with a strong desire to acquire on-the-job training, to succeed, and to develop intellectual and practical professional skills.
  • Demonstrated ability to work well in teams is essential.
  • This position will require manual dexterity with small and large parts and must be skilled to maintain and repair various vacuum, electronic, electrical and mechanical systems.
  • Basic machining and mechanical design experience and working knowledge on electrical/electronic systems are also required.

Certificates and Licenses:

An active Massachusetts Journeyman Electrician license is desired. This will allow to work on high voltage equipment.


Additional Information
  • Standard Hours/Schedule: 35 hours per week
  • Visa Sponsorship Information: Harvard University is unable to provide visa sponsorship for this position
  • Pre-Employment Screening: Identity, Education
  • Other Information:
    • We are first responders to any gas or chemical leaks. We are required to train and to maintain safe working environment for staff and users in the Fab.
    • Note: this position is included within the Harvard Academic Workers (HAW) union.

Work Format Details

This is a position that is based at a Harvard campus location with some remote work options available. Additional details will be discussed during the interview process. All remote work must be performed within one of the Harvard Registered Payroll States, which currently includes Massachusetts, Connecticut, Maine, New Hampshire, Rhode Island, Vermont, Georgia, Illinois, Maryland, New Jersey, New York, Virginia, Washington, and California (CA for exempt positions only). Certain visa types and funding sources may limit work location. Individuals must meet work location sponsorship requirements prior to employment.

Salary Grade and Ranges

This position is salary grade level 057. Please visit  Harvard's Salary Ranges  to view the corresponding salary range and related information.

Benefits

Harvard offers a comprehensive benefits package that is designed to support a healthy work-life balance and your physical, mental and financial wellbeing. Because here, you are what matters. Our benefits include, but are not limited to:

  • Generous paid time off including parental leave
  • Medical, dental, and vision health insurance coverage starting on day one
  • Retirement plans with university contributions
  • Wellbeing and mental health resources
  • Support for families and caregivers
  • Professional development opportunities including tuition assistance and reimbursement
  • Commuter benefits, discounts and campus perks

Learn more about these and additional benefits on our Benefits & Wellbeing Page.

EEO/Non-Discrimination Commitment Statement

Harvard University is committed to equal opportunity and non-discrimination. We seek talent from all parts of society and the world, and we strive to ensure everyone at Harvard thrives. Our differences help our community advance Harvard's academic purposes.

Harvard has an equal employment opportunity policy that outlines our commitment to prohibiting discrimination on the basis of race, ethnicity, color, national origin, sex, sexual orientation, gender identity, veteran status, religion, disability, or any other characteristic protected by law or identified in the university's non-discrimination policy. Harvard's equal employment opportunity policy and non-discrimination policy help all community members participate fully in work and campus life free from harassment and discrimination.